Dr. Karl Umstadter is currently the EUV Machine Architect and a Sr. Principal Product Systems Engineer for ASML in San Diego, CA. Karl has been developing advanced semiconductor inspection and lithographic technology for 15 years. He joined ASML in 2015 as a Systems Engineer developing early EUV sources and was the lead for the High NA Source Program recently adopted by the industry. Prior to that he worked at KLA in their EUV Reticle Inspection and eBeam Review Programs.

Karl received his B.S., M.S. and Ph.D. in Engineering Physics from RPI. His expertise includes plasma physics and applications, materials science, lasers and photonics, diagnostics, and all facets of systems engineering. Before joining the semiconductor industry, he investigated numerous plasma technologies for nondestructive measurements, nuclear waste cleanup and fusion energy applications as a principal investigator for universities, startups and national laboratories. A Certified Laser Safety Officer, Karl is also on the Board for the Accredited Standards Committee for Laser Safety Standards (Z136). When not engaged at work, he enjoys cycling, golf, scuba diving and time with family.